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Proceedings Paper

Phase plates in the object plane for microlithography
Author(s): David Levenson
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Paper Abstract

Phase-shifting masks, which have many similarities to the phase plates used to smooth laser beams, are being developed to project high-contrast patterns for semiconductor manufacturing.

Paper Details

Date Published: 1 May 1993
PDF: 8 pages
Proc. SPIE 1870, Laser Coherence Control: Technology and Applications, (1 May 1993); doi: 10.1117/12.154478
Show Author Affiliations
David Levenson, IBM Almaden Research Ctr. (United States)

Published in SPIE Proceedings Vol. 1870:
Laser Coherence Control: Technology and Applications
Howard T. Powell; Terrance J. Kessler, Editor(s)

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