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Proceedings Paper

Dynamics of deformable mirror actuators
Author(s): Wayland Clinton Marlow
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Paper Abstract

The electro-mechanical equations governing the motion of the surface of a deformable mirror, due to the activation of a piezoelectric or electrostrictive actuator mechanically located between the mirror surface and the mirror substrate, are derived in terms of the fundamental electro-mechanical parameters of the mirror-actuator configuration. The equations of motion are solved in the frequency domain and the solutions show reasonable agreement with experimental data such as Bode plots, which characterize the frequency dependence of the amplitude and phase of the mirror surface motion, and with frequency dependent impedance measurements. Time domain solutions are used to construct time histories of an actuator under a step-voltage input.

Paper Details

Date Published: 25 August 1993
PDF: 19 pages
Proc. SPIE 1920, Active and Adaptive Optical Components and Systems II, (25 August 1993); doi: 10.1117/12.152689
Show Author Affiliations
Wayland Clinton Marlow, United Technologies Optical Systems (United States)


Published in SPIE Proceedings Vol. 1920:
Active and Adaptive Optical Components and Systems II
Mark A. Ealey, Editor(s)

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