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Proceedings Paper

1.8-inch poly-Si TFT-LCDs with novel TFT structure and storage capacitance arrangement
Author(s): Takashi Sugawara; Kazuhiro Kobayashi; Hiroyuki Murai; Christiaan Baert; Takao Sakamoto; Hidetada Tokioka; Yuichi Masutani; Hirofumi Namizaki; Masahiro Nunoshita
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Paper Abstract

We have fabricated 1.8-inch and 86,400-pixel poly-Si TFT-LCDs with a novel TFT structure and a storage capacitance (Cst) arrangement. The TFTs have a self-aligned offset structure which is made by a simple process without using an additional mask. With this structure, we have reduced the OFF current, and hence, attained a high ON/OFF current ratio of 107. A novel Cst line arrangement called 'modified Cst on gate' was adopted. Gate lines and Cst lines are arranged alternatively, and the (n-1)-th Cst line is connected to the n-th gate line at the line's end. The Cst line works as redundancy of the gate line. Consequently, we have obtained TFT arrays with no line-defects (240 gate lines). By using these techniques, we have succeeded in fabricating a high-performance 1.8-inch poly-Si TFT-LCD panel for a projection TV.

Paper Details

Date Published: 13 August 1993
PDF: 7 pages
Proc. SPIE 1911, Liquid Crystal Materials, Devices, and Applications II, (13 August 1993); doi: 10.1117/12.151214
Show Author Affiliations
Takashi Sugawara, Mitsubishi Materials & Electronic Devices Lab. (Japan)
Kazuhiro Kobayashi, Mitsubishi Materials & Electronic Devices Lab. (Japan)
Hiroyuki Murai, Mitsubishi Materials & Electronic Devices Lab. (Japan)
Christiaan Baert, Interuniv. Microelectronics Ctr. (Belgium)
Takao Sakamoto, Mitsubishi Materials & Electronic Devices Lab. (Japan)
Hidetada Tokioka, Mitsubishi Materials & Electronic Devices Lab. (Japan)
Yuichi Masutani, Mitsubishi Materials & Electronic Devices Lab. (Japan)
Hirofumi Namizaki, Mitsubishi Materials & Electronic Devices Lab. (Japan)
Masahiro Nunoshita, Mitsubishi Materials & Electronic Devices Lab. (Japan)


Published in SPIE Proceedings Vol. 1911:
Liquid Crystal Materials, Devices, and Applications II
Uzi Efron; Michael D. Wand, Editor(s)

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