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Proceedings Paper

New methods for generating microlenses by lithographic processes
Author(s): Yoel S. Arieli; Michael Ben-Ezra; Naftali Paul Eisenberg
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Paper Abstract

Microlenses can be made by refractive and diffractive optics. A tailored distribution of light creates, in exposed photoresist, a three dimensional pattern, which is then reproduced by ion beam etching in the substrate, resulting in the desired microlens. The first technique uses a Fraunhofer diffraction pattern of a hole in the focal plane of a lens. The second technique uses diffractive optics, i.e. a Dammann grating, to generate a uniform array of equally spaced beams. The theoretical background of a Dammann grating and the experimental results are presented.

Paper Details

Date Published: 13 August 1993
PDF: 5 pages
Proc. SPIE 1972, 8th Meeting on Optical Engineering in Israel: Optoelectronics and Applications in Industry and Medicine, (13 August 1993); doi: 10.1117/12.151101
Show Author Affiliations
Yoel S. Arieli, Jerusalem College of Technology (Israel)
Michael Ben-Ezra, Jerusalem College of Technology (Israel)
Naftali Paul Eisenberg, Jerusalem College of Technology (Israel)


Published in SPIE Proceedings Vol. 1972:
8th Meeting on Optical Engineering in Israel: Optoelectronics and Applications in Industry and Medicine

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