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Proceedings Paper

Optimized polishing of optical surfaces
Author(s): Rainer G. Schuhmann; Michael Schulz-Grosser; Dieter Froelich
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Paper Abstract

For laser applications very smooth surfaces are required more frequently. High power systems need components, such as cavity mirrors and lenses for beam forming and focussing, with extremely high laser damage threshold. In low power systems for metrology any light scattering originating from a relatively high surface roughness results in measuring errors. In both cases flat and curved surfaces with very low micro-roughness rms values close to 1 nm or even less have to be produced. This requires the optimization of the polishing process. Minimized surface roughness and light scattering are shown as results of this optimization.

Paper Details

Date Published: 13 August 1993
PDF: 4 pages
Proc. SPIE 1971, 8th Meeting on Optical Engineering in Israel: Optical Engineering and Remote Sensing, (13 August 1993); doi: 10.1117/12.151004
Show Author Affiliations
Rainer G. Schuhmann, Spindler & Hoyer GmbH & Co. (Germany)
Michael Schulz-Grosser, Spindler & Hoyer GmbH & Co. (Germany)
Dieter Froelich, Spindler & Hoyer GmbH & Co. (Germany)


Published in SPIE Proceedings Vol. 1971:
8th Meeting on Optical Engineering in Israel: Optical Engineering and Remote Sensing

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