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Proceedings Paper

Compositional uniformity control on deposition of magneto-optical disk
Author(s): Tzuan-Ren Jeng; Vien Shien Lo; Shiuh Chao; Tsai Chu Hsiao; Derray Huang
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Paper Abstract

The rare earth-transition metal (RE-TM) alloys are widely accepted as the most suitable material for magneto-optical (MO) recording. The magnetic and optical properties of the recording media, hence the read-write-erase characteristics of the disk, are crucially dependent on the composition of the RE-TM films. Tailoring the composition of the films to meet the requirements in various magneto-optical recording applications is, therefore, important. In-line sputtering is the most common method for RE-TM film coating in disk production process. There are two common methods for fabricating sputter target; one is powder-sintering, the other is melt-casting. The former method yields a target composed of mixtures of pure element phases and certain percentage of intermetallic compound phases, the latter method yields a target composed of 100% intermetallic compound phases. The sputtering of RE-TM target often gives nonuniform composition distribution on the disk based on past experiences. This problem motivated us to study the sputtered atom distribution of the targets which were fabricated by different methods.

Paper Details

Date Published: 13 August 1993
PDF: 3 pages
Proc. SPIE 2053, Optical Storage (ISOS '92), (13 August 1993); doi: 10.1117/12.150663
Show Author Affiliations
Tzuan-Ren Jeng, National Tsing Hua Univ. (Taiwan)
Vien Shien Lo, National Tsing Hua Univ. (Taiwan)
Shiuh Chao, National Tsing Hua Univ. (Taiwan)
Tsai Chu Hsiao, ITRI (Taiwan)
Derray Huang, ITRI (Taiwan)

Published in SPIE Proceedings Vol. 2053:
Optical Storage (ISOS '92)
Fuxi Gan, Editor(s)

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