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Proceedings Paper

KrF excimer lasers for DUV-lithography
Author(s): Rainer Paetzel; Hermann Buecher; Ulrich Rebhan
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Paper Abstract

The paper presents the features of the Lambda Physik 248 LEX KrF DUV-Lithography laser for spectral performance, reliability, and system integration. The 248 LEX is based on Lambda Physik's series of `LAMBDA' industrial lasers. Data of 5 years field experience with the LAMBDA high power industrial lasers are used to discuss reliability of the laser in and economic aspects of the laser application in terms of cost-of-ownership. Results of an endurance test program for lithography lasers are used to given an outlook on system performance and component lifetime. Based on these data the cost-of-ownership is projected for the coming years and multiple system installations. An update of Lambda Physiks' R&D effort and recent progress is given.

Paper Details

Date Published: 8 August 1993
PDF: 8 pages
Proc. SPIE 1927, Optical/Laser Microlithography, (8 August 1993); doi: 10.1117/12.150468
Show Author Affiliations
Rainer Paetzel, Lambda Physik GmbH (Germany)
Hermann Buecher, Lambda Physik GmbH (Germany)
Ulrich Rebhan, Lambda Physik GmbH (Germany)

Published in SPIE Proceedings Vol. 1927:
Optical/Laser Microlithography
John D. Cuthbert, Editor(s)

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