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Proceedings Paper

Simulating the stitching performance of flat-panel-display steppers
Author(s): Roger C. Sumner; David S. Holbrook
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Paper Abstract

There are four major imaging issues when using a flat panel display (FPD) stepper: stitching, overlay, CD control, and the variation in CDs across stitching boundaries (CD stitching or CD continuity). Simulations have been performed in an effort to analyze the performance of FPD steppers, and a comparison is made between the performance criteria of FPD steppers and IC steppers.

Paper Details

Date Published: 8 August 1993
PDF: 10 pages
Proc. SPIE 1927, Optical/Laser Microlithography, (8 August 1993); doi: 10.1117/12.150450
Show Author Affiliations
Roger C. Sumner, MRS Technology, Inc. (United States)
David S. Holbrook, MRS Technology, Inc. (United States)

Published in SPIE Proceedings Vol. 1927:
Optical/Laser Microlithography
John D. Cuthbert, Editor(s)

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