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Proceedings Paper

Phase image metrology with a modified coherence probe microscope
Author(s): Diana Nyyssonen; Joel L. Seligson; Isaac Mazor
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Paper Abstract

Bright field optical microscopy has well-known nonlinearity problems due to varying film thickness. Phase images eliminate many of these problems. This paper will describe the advantages of phase imaging, based on calculated results. Experimental corroboration has been obtained with a bimodal coherence probe microscope. In the less coherent mode, the microscope utilizes illumination with a high numerical aperture and broad spectral bandwidth. In the coherent mode, the illumination is monochromatic and has a low numerical aperture. Experimental data will be presented and compared to theoretical results. The system demonstrates extended resolution for some materials and a reduced sensitivity to substrate variations.

Paper Details

Date Published: 4 August 1993
PDF: 12 pages
Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); doi: 10.1117/12.149020
Show Author Affiliations
Diana Nyyssonen, IBM East Fishkill (United States)
Joel L. Seligson, KLA Instruments Corp. (United States)
Isaac Mazor, KLA Instruments Corp. (United States)


Published in SPIE Proceedings Vol. 1926:
Integrated Circuit Metrology, Inspection, and Process Control VII
Michael T. Postek, Editor(s)

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