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Proceedings Paper

Aplanatic microlenses and applications in the semiconductor industry
Author(s): Mark P. Davidson
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Paper Abstract

An aplanatic microlens is a small (typically 10 to 450 microns) diameter lens, which is placed close to the object being viewed and acts as a pre-magnifying lens for a microscope system. The lens is mounted on a stalk for easy positioning with a micromanipulator. All aberrations scale with size, so this small lens shows good chromatic correction. It is broad band even in the deep ultraviolet and even at high numerical aperture. The lens operates as a nearfield immersion lens when its planar surface touches the object being viewed. In this case the numerical aperture can be as large as n, the index of refraction of the material of the lens. For fused silica, a convenient material, this is about 1.46.

Paper Details

Date Published: 4 August 1993
PDF: 8 pages
Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); doi: 10.1117/12.149014
Show Author Affiliations
Mark P. Davidson, Spectel Co. (United States)


Published in SPIE Proceedings Vol. 1926:
Integrated Circuit Metrology, Inspection, and Process Control VII
Michael T. Postek, Editor(s)

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