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Proceedings Paper

Applications of an atomic force metrology system in semiconductor manufacturing
Author(s): Jeanne E. Beacham; Francois M. Dumesnil; Barrie L. VanDevender
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Paper Details

Date Published: 4 August 1993
PDF: 11 pages
Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); doi: 10.1117/12.149000
Show Author Affiliations
Jeanne E. Beacham, Tencor Instruments (United States)
Francois M. Dumesnil, Tencor Instruments (United States)
Barrie L. VanDevender, Tencor Instruments (United States)


Published in SPIE Proceedings Vol. 1926:
Integrated Circuit Metrology, Inspection, and Process Control VII
Michael T. Postek, Editor(s)

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