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Proceedings Paper

Dual-sensor technology for high-speed detection of 0.1-um defects
Author(s): David Alumot; Gadi Neumann; Rivi Sherman; Ehud Tirosh
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Paper Details

Date Published: 4 August 1993
PDF: 12 pages
Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); doi: 10.1117/12.148996
Show Author Affiliations
David Alumot, Orbot Instruments Ltd. (Israel)
Gadi Neumann, Orbot Instruments Ltd. (Israel)
Rivi Sherman, Orbot Instruments Ltd. (Israel)
Ehud Tirosh, Orbot Instruments Ltd. (Israel)


Published in SPIE Proceedings Vol. 1926:
Integrated Circuit Metrology, Inspection, and Process Control VII
Michael T. Postek, Editor(s)

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