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Proceedings Paper

Thinned back-illuminated CCD for x-ray microscopy
Author(s): Werner Meyer-Ilse; Thomas Wilhein; Peter Guttmann
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Paper Abstract

X-ray microscopy requires image detectors for soft x-rays (2.4 nm to 4.5 nm wavelength) with high detective quantum efficiency for a low radiation dosage applied to the sample. A thinned backside illuminated CCD has been attached to the Gottingen x-ray microscope, which is installed at the BESSY electron storage ring in Berlin. The CCD was a commercially available device with 1024 by 1024 pixels (each 24 micrometers square) without the anti-reflecting coating, which is applied to the standard device. First experiments performed at the primarily used x- ray wavelength of 2.4 nm show a considerable reduction of exposure time compared to the previously used photographic emulsion. This greatly reduces the radiation dose applied to the sample specimen. There was no degradation in performance of the CCD detected after one week of operation.

Paper Details

Date Published: 12 July 1993
PDF: 5 pages
Proc. SPIE 1900, Charge-Coupled Devices and Solid State Optical Sensors III, (12 July 1993); doi: 10.1117/12.148602
Show Author Affiliations
Werner Meyer-Ilse, Lawrence Berkeley Lab. (United States)
Thomas Wilhein, Univ. Goettingen (Germany)
Peter Guttmann, Univ. Goettingen (Germany)


Published in SPIE Proceedings Vol. 1900:
Charge-Coupled Devices and Solid State Optical Sensors III
Morley M. Blouke, Editor(s)

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