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Proceedings Paper

Stable ultraviolet antirelection coatings for charge-coupled devices
Author(s): Morley M. Blouke; Mark D. Nelson
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Paper Abstract

In this paper we report on recent work on the development of a stable ultraviolet sensitive antireflection coating for use on charge-coupled devices. The coatings that are discussed in this paper are single layer Si3N4 and a dual layer Si3N4/MgF2 coating. Both coatings provide excellent quantum efficiencies at 300 nm (> 50 - 60%) and useful response down to 200 nm (the limit of the measurement capability). Ultraviolet (UV) flooding is shown to be effective in increasing the quantum efficiency. The films demonstrate a long time constant decay of the UV enhanced quantum efficiency which is of the order of months at room temperature. A simple model of a thermally activated process to characterize the decay in quantum efficiency has been developed.

Paper Details

Date Published: 12 July 1993
PDF: 13 pages
Proc. SPIE 1900, Charge-Coupled Devices and Solid State Optical Sensors III, (12 July 1993); doi: 10.1117/12.148601
Show Author Affiliations
Morley M. Blouke, Tektronix, Inc. (United States)
Mark D. Nelson, Tektronix, Inc. (United States)


Published in SPIE Proceedings Vol. 1900:
Charge-Coupled Devices and Solid State Optical Sensors III
Morley M. Blouke, Editor(s)

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