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Proceedings Paper

Page-sized amorphous silicon image sensor arrays
Author(s): Robert A. Street; Richard L. Weisfield; Steven E. Nelson; R. Chang
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Paper Abstract

A page-sized flat-plate image sensor array intended for use as a contact imager for documents is described. The imaging device is a matrix-addressed pixel array of light sensors fabricated from hydrogenated amorphous silicon on a glass substrate, with each pixel comprising an n-i-p sensor and a thin film switching transistor. The array requires no imaging optics and therefore collects light very efficiently, making it well suited to high speed document input or for medical X-ray imaging. The array fabrication, drive electronics, imaging properties, and applications are discussed, and some examples of images are presented.

Paper Details

Date Published: 12 July 1993
PDF: 12 pages
Proc. SPIE 1900, Charge-Coupled Devices and Solid State Optical Sensors III, (12 July 1993); doi: 10.1117/12.148592
Show Author Affiliations
Robert A. Street, Xerox Palo Alto Research Ctr. (United States)
Richard L. Weisfield, Xerox Palo Alto Research Ctr. (United States)
Steven E. Nelson, Xerox Palo Alto Research Ctr. (United States)
R. Chang, Xerox Palo Alto Research Ctr. (United States)


Published in SPIE Proceedings Vol. 1900:
Charge-Coupled Devices and Solid State Optical Sensors III
Morley M. Blouke, Editor(s)

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