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Proceedings Paper

Micro-optical setup with microlenses and microprisms based on refractive optics
Author(s): Karl-Heinz Brenner; Michael Frank; Maria Kufner; Stefan Kufner; Joerg Moisel; A. Mueller; Stefan Sinzinger; Markus E. Testorf; Jost Goettert; Juergen Mohr
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Paper Abstract

Deep etch lithography of PMMA by the LIGA-technique or H+ lithography is a powerful tool for the fabrication of very high refractive microprisms. We have realized a microintegrated optical imaging system using microprisms fabricated by the LIGA-process and microlenses with a diameter of 250 micrometers . Thus the size of the imaging system is less than 2 mm+.

Paper Details

Date Published: 12 July 1993
PDF: 6 pages
Proc. SPIE 1806, Optical Computing, (12 July 1993); doi: 10.1117/12.147834
Show Author Affiliations
Karl-Heinz Brenner, Univ. Erlangen-Nuernberg (Germany)
Michael Frank, Univ. Erlangen-Nuernberg (Germany)
Maria Kufner, Univ. Erlangen-Nuernberg (Germany)
Stefan Kufner, Univ. Erlangen-Nuernberg (Germany)
Joerg Moisel, Univ. Erlangen-Nuernberg (Germany)
A. Mueller, Univ. Erlangen-Nuernberg (Germany)
Stefan Sinzinger, Univ. Erlangen-Nuernberg (Germany)
Markus E. Testorf, Univ. Erlangen-Nuernberg (Germany)
Jost Goettert, Univ. Karlsruhe (Germany)
Juergen Mohr, Univ. Karlsruhe (Germany)

Published in SPIE Proceedings Vol. 1806:
Optical Computing
Andrey M. Goncharenko; Fedor V. Karpushko; George V. Sinitsyn; Sergey P. Apanasevich, Editor(s)

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