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Proceedings Paper

Investigation of evolution of microprofile on silicon surface under high-power laser-pulsed effect
Author(s): Alexander F. Banishev; I. M. Chistyakov
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Paper Details

Date Published: 24 June 1993
PDF: 3 pages
Proc. SPIE 1856, Laser Radiation Photophysics, (24 June 1993); doi: 10.1117/12.147621
Show Author Affiliations
Alexander F. Banishev, Research Ctr. of Technological Lasers (Russia)
I. M. Chistyakov, Research Ctr. of Technological Lasers (Russia)


Published in SPIE Proceedings Vol. 1856:
Laser Radiation Photophysics
Bodil Braren; Mikhail N. Libenson, Editor(s)

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