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Proceedings Paper

Formation of reversible and irreversible structural defects on silicon surface under laser-pulsed influence
Author(s): Alexander F. Banishev; L. V. Novikova; M. M. Novikov
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Paper Details

Date Published: 24 June 1993
PDF: 7 pages
Proc. SPIE 1856, Laser Radiation Photophysics, (24 June 1993); doi: 10.1117/12.147618
Show Author Affiliations
Alexander F. Banishev, Research Ctr. of Technological Lasers (Russia)
L. V. Novikova, Research Ctr. of Technological Lasers (Russia)
M. M. Novikov, Research Ctr. of Technological Lasers (Russia)

Published in SPIE Proceedings Vol. 1856:
Laser Radiation Photophysics
Bodil Braren; Mikhail N. Libenson, Editor(s)

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