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Proceedings Paper

Damage thresholds of AR coating on subsurface-damage-removed fused silica glass
Author(s): Kunio Yoshida; Kanyoshi Ochi; Hidetsugu Yoshida; Minoru Ohtani; M. Sawamura
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Paper Abstract

We have developed a coating chamber (diameter of 1600 mm(phi )) including ion guns for removal of subsurface which can deposit on the substrate of the maximum diameter of 800 mm (phi ). The damage threshold of AR coating on subsurface removed fused silica glass of 800 mm(phi ) showed 7 J/cm2 at 355 nm, pulsewidth of 0.3 ns. (Abstract only)

Paper Details

Date Published: 24 June 1993
PDF: 2 pages
Proc. SPIE 1848, 24th Annual Boulder Damage Symposium Proceedings -- Laser-Induced Damage in Optical Materials: 1992, (24 June 1993); doi: 10.1117/12.147390
Show Author Affiliations
Kunio Yoshida, Osaka Institute of Technology (Japan)
Kanyoshi Ochi, Osaka Institute of Technology (Japan)
Hidetsugu Yoshida, Osaka Univ. (Japan)
Minoru Ohtani, Canon Inc. (Japan)
M. Sawamura, Canon Inc. (Japan)


Published in SPIE Proceedings Vol. 1848:
24th Annual Boulder Damage Symposium Proceedings -- Laser-Induced Damage in Optical Materials: 1992
Harold E. Bennett; Lloyd L. Chase; Arthur H. Guenther; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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