Share Email Print

Proceedings Paper

Noncontact optical characterization of thermal and mechanical properties of thin films
Author(s): John A. Rogers; Keith A. Nelson
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We demonstrate a new purely optical based real-time method for excitation and detection of acoustic and thermal disturbances in thin films. The technique is applied to the determination of viscoelastic properties of unsupported and silicon-supported polyimide thin (approximately 1 micron) films. By comparing data from supported films with that from unsupported films, we demonstrate the sensitivity of this technique to delaminations. We then present calculations that suggest how the same technique may be used to probe film-substrate adhesive quality.

Paper Details

Date Published: 17 June 1993
PDF: 12 pages
Proc. SPIE 1861, Ultrafast Pulse Generation and Spectroscopy, (17 June 1993); doi: 10.1117/12.147064
Show Author Affiliations
John A. Rogers, Massachusetts Institute of Technology (United States)
Keith A. Nelson, Massachusetts Institute of Technology (United States)

Published in SPIE Proceedings Vol. 1861:
Ultrafast Pulse Generation and Spectroscopy
Timothy R. Gosnell; Antoinette J. Taylor; Keith A. Nelson; Michael C. Downer, Editor(s)

© SPIE. Terms of Use
Back to Top