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Proceedings Paper

Long-lifetime silicon photoconductive semiconductor switches
Author(s): Guillermo M. Loubriel; Fred J. Zutavern; Gary J. Denison; Wesley D. Helgeson; Dan L. McLaughlin; Marty W. O'Malley; C. H. Sifford; L. C. Beavis; Carl H. Seager; Arye Rosen; Richard G. Madonna
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Paper Abstract

We present the results of experiments aimed at improving the lifetime (longevity) of Si photoconductive semiconductor switches (PCSS). Because damage at the metal-semiconductor interface is the primary damage mechanism in most PCSS, we have tested different contact metallizations. The test setup utilizes: a Nd:YAG laser that operates at 540 Hz with 50 mJ, 10 ns FWHM pulses; a circuit that charges a 50 (Omega) line in 800 ns and discharges it in 20 ns through a 50 (Omega) load; and a lateral switch geometry and 0.25 cm by 0.25 cm switches. The contacts examined include: Cr(diffused)-Cr-Mo-Au, Al(diffused)-Cr-Mo-Au, 31P(ion implanted)-Ti-Pt, Al(diffused)-Pt-Ti-Pd-Au, and edge contacts. In the case of the Cr contacts we have tried thicker Mo or Au layers. For the Al contacts we have tried 1 micrometers and 0.1 micrometers thick depositions. Most contacts survived 107 pulses when switching 32 kV/cm (8 kV over 0.25 cm). The Al diffused went up to 44 kV/cm (1 X 105 pulses). The implanted P switch was switched 2.2 X 107 times at 44 kV/cm and 0.9 X 106 times at 48 kV/cm.

Paper Details

Date Published: 9 June 1993
PDF: 12 pages
Proc. SPIE 1873, Optically Activated Switching III, (9 June 1993); doi: 10.1117/12.146560
Show Author Affiliations
Guillermo M. Loubriel, Sandia National Labs. (United States)
Fred J. Zutavern, Sandia National Labs. (United States)
Gary J. Denison, Sandia National Labs. (United States)
Wesley D. Helgeson, Sandia National Labs. (United States)
Dan L. McLaughlin, Sandia National Labs. (United States)
Marty W. O'Malley, Sandia National Labs. (United States)
C. H. Sifford, Sandia National Labs. (United States)
L. C. Beavis, Sandia National Labs. (United States)
Carl H. Seager, Sandia National Labs. (United States)
Arye Rosen, David Sarnoff Research Ctr. (United States)
Richard G. Madonna, Grumman Corporate Research Ctr. (United States)

Published in SPIE Proceedings Vol. 1873:
Optically Activated Switching III
R. Aaron Falk, Editor(s)

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