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Proceedings Paper

Image formation in capillary arrays: the Kumakhov lens
Author(s): Guan-Jye Chen; Richard K. Cole; Franco Cerrina
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Paper Abstract

The successful ray-tracing simulation of the Kumakhov lens has been demonstrated. The issues of the transmission coefficient and the output intensity uniformity of Kumakhov lens are addressed. Various factors such as source distance, tube shape, thickness, and diameter which affect the output performance of this new optics are also discussed.

Paper Details

Date Published: 24 June 1993
PDF: 9 pages
Proc. SPIE 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III, (24 June 1993); doi: 10.1117/12.146518
Show Author Affiliations
Guan-Jye Chen, Univ. of Wisconsin/Madison (United States)
Richard K. Cole, Univ. of Wisconsin/Madison (United States)
Franco Cerrina, Univ. of Wisconsin/Madison (United States)


Published in SPIE Proceedings Vol. 1924:
Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III
David O. Patterson, Editor(s)

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