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Proceedings Paper

Index profile measurements of channel waveguides by using a differential phase optical microscope
Author(s): Sergey I. Bozhevolnyi; Sergei I. Bozhevolnyi; Evgeny M. Zolotov; A. V. Postnikov; P. S. Rad'ko
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Paper Abstract

Various differential optical techniques have been developed to examine objects with minute topography and refractive-index variations. The differential phase optical microscope (DPOM) was shown to be capable of measuring variations in optical path length with the accuracy of about 0.2 nm. This technique seems to be very promising for the study of integrated optical components, where numerous waveguide structures usually have complicated refractive-index profiles and there is a well established need to know and control them properly. The differential approach is based on measurements of phase difference between two beams reflected from two adjacent points of a sample. It results in a high depth resolution but, on the other hand, the system response is fairly simple only for step-like structures and it should be treated carefully when measuring the arbitrary refractive-index profiles. The parametric method proposed recently uses the presumption about the shape of profile, the parameters of which are to be determined according to the differential phase measurements by the DPOM. Therefore, this method can be applied only if there is some previous information about the refractive-index profile of the structure to be examined.

Paper Details

Date Published: 14 May 1993
PDF: 10 pages
Proc. SPIE 1932, Guided-Wave Optics, (14 May 1993); doi: 10.1117/12.145595
Show Author Affiliations
Sergey I. Bozhevolnyi, Institute of Microelectronics (Russia)
Sergei I. Bozhevolnyi, Institute of Microelectronics (Russia)
Evgeny M. Zolotov, Institute of Microelectronics (Russia)
A. V. Postnikov, Institute of Microelectronics (Russia)
P. S. Rad'ko, Institute of Microelectronics (Russia)

Published in SPIE Proceedings Vol. 1932:
Guided-Wave Optics
Alexander M. Prokhorov; Evgeny M. Zolotov, Editor(s)

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