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Proceedings Paper

Influence of substrate on optical waveguide properties
Author(s): Alexander V. Khomchenko; V. P. Red'ko
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Paper Abstract

Properties of thin film waveguides obtained by using rf-sputtering from optical glasses on glass substrates of different composition have been studied. It is established that the character of the sputtered film properties dependence on the substrate composition is determined by the ratio of sputtered target and used substrate material mol-fractions. Optical heterogeneity of these films has been studied. The transition layer parameters dependence on the substrate composition is considered. The refractive index profile of films has been investigated by means of ellipsometry and WKB method. The film formation initial condition effect on its optical parameters is discussed.

Paper Details

Date Published: 14 May 1993
PDF: 10 pages
Proc. SPIE 1932, Guided-Wave Optics, (14 May 1993); doi: 10.1117/12.145588
Show Author Affiliations
Alexander V. Khomchenko, Institute of Applied Optics (Belarus)
V. P. Red'ko, Institute of Applied Optics (Belarus)

Published in SPIE Proceedings Vol. 1932:
Guided-Wave Optics
Alexander M. Prokhorov; Evgeny M. Zolotov, Editor(s)

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