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Proceedings Paper

Computer modeling of data processing method for optical control of the thin-film structures in lithography
Author(s): Yury Snezhko
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Paper Abstract

Progress in development of the advanced optical materials for window applications requires the necessity of creating non-contact optical methods to characterize properties of thin film materials and their structures. Many existing systems for scanning control such optical thin films structures have limited spatial resolution as laser shift interferometers or need to be calibrated as methods of the intensivity distribution registration in diffraction orders. Some attempts and demonstrations to increase spatial resolution of the phase microscopes have been made. However the field amplitude-phase methods of surface/structure registration contain from theoretical point much more possibilities. The necessity of creating direct real time scanning methods to control thin films structures in the mode of registration coinciding with operation mode of their industrial application with appropriate for this application spatial resolution has stimulated preparing of this paper.

Paper Details

Date Published: 28 May 1993
PDF: 12 pages
Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); doi: 10.1117/12.145568
Show Author Affiliations
Yury Snezhko, Laser Measurements Consulting (United States)

Published in SPIE Proceedings Vol. 1821:
Industrial Applications of Optical Inspection, Metrology, and Sensing
Gordon M. Brown; Kevin G. Harding; H. Philip Stahl, Editor(s)

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