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Proceedings Paper

Partial coherence theory of multilayer thin-film optical properties
Author(s): Klaus Richter; Chang-ho Chen; Chang-Lin Tien
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Paper Abstract

Based on the theory of partially coherent light, an analytical scheme is established to determine the radiative properties of multilayer thin films. An accurate knowledge of the magnitude of interference effects is absolutely indispensable when measurements of the spectral transmissivity and reflectivity of thin films are used to derive optical constants of the film material. As illustrated by experiments, in many cases of practical interest neither a geometrical nor a wave optics model gives satisfactory results. A general formulation is introduced that covers this intermediate, partially coherent regime as well as the limiting cases of geometrical and wave optics. The complex degree of coherence provides a direct measure of the varying influence of interference effects on spectral measurements. An analytical approximation of the numerical approach is developed that gives a good physical understanding of the occurring phenomena. Experiments on the transmissivity of one- and two-layer films using a Fourier-transform infrared spectrometer in the medium infrared range ((lambda) equals 2 - 20 micrometers ) confirm the theoretical approach and the relevance of the addressed issue.

Paper Details

Date Published: 28 May 1993
PDF: 12 pages
Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); doi: 10.1117/12.145545
Show Author Affiliations
Klaus Richter, Univ. of California/Berkeley (United States)
Chang-ho Chen, Univ. of California/Berkeley (United States)
Chang-Lin Tien, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 1821:
Industrial Applications of Optical Inspection, Metrology, and Sensing
Gordon M. Brown; Kevin G. Harding; H. Philip Stahl, Editor(s)

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