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Proceedings Paper

Multidetector photopolarimeters for industrial optical sensing and metrology
Author(s): Rasheed M. A. Azzam
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Paper Abstract

Considerable progress has been achieved recently in the development of new ellipsometric and polarimetry sensors that meet the requirements of an industrial environment. In particular, multidetector instruments, such as the four-detector photopolarimeter (FDP or Stokes meter), are particularly suited for fast, on-line, and real-time monitoring of industrial processes because of their simplicity, ruggedness, and absence of moving parts. We review some of these recent developments with reference to the semiconductor, steel-making, and optical- coating industries as examples.

Paper Details

Date Published: 28 May 1993
PDF: 14 pages
Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); doi: 10.1117/12.145544
Show Author Affiliations
Rasheed M. A. Azzam, Univ. of New Orleans (United States)

Published in SPIE Proceedings Vol. 1821:
Industrial Applications of Optical Inspection, Metrology, and Sensing
Gordon M. Brown; Kevin G. Harding; H. Philip Stahl, Editor(s)

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