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Proceedings Paper

High-resolution fast-response profilometer based on active stabilized interferometry
Author(s): Fumio Murakami
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Paper Abstract

A noncontact surface profiling technique based on active-stabilized interferometry is described. Direct frequency monitoring by the reference interferometer connected parallel to the sensing interferometer provides high accuracy in nanometer resolution measurement.

Paper Details

Date Published: 28 May 1993
PDF: 9 pages
Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); doi: 10.1117/12.145537
Show Author Affiliations
Fumio Murakami, Japan Radio Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 1821:
Industrial Applications of Optical Inspection, Metrology, and Sensing
Gordon M. Brown; Kevin G. Harding; H. Philip Stahl, Editor(s)

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