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Proceedings Paper

Laser gage using chirped synthetic wavelength interferometry
Author(s): Peter J. de Groot; John A. McGarvey
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Paper Abstract

An absolute-ranging interferometer will be described that is suitable for dimensional gaging and surface profiling in manufacturing applications. The interferometer has a two-frequency source and a continuously tuned or 'chirped' synthetic wavelength. The fiber-coupled experimental system uses an eye-safe 25 (mu) W, 0.25 mm diameter collimated probe beam; and has an absolute distance measurement accuracy of 3 micrometers over a 150 mm dynamic range.

Paper Details

Date Published: 28 May 1993
PDF: 9 pages
Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); doi: 10.1117/12.145530
Show Author Affiliations
Peter J. de Groot, Boeing Aerospace & Electronics (United States)
John A. McGarvey, Boeing Aerospace & Electronics (United States)

Published in SPIE Proceedings Vol. 1821:
Industrial Applications of Optical Inspection, Metrology, and Sensing
Gordon M. Brown; Kevin G. Harding; H. Philip Stahl, Editor(s)

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