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Proceedings Paper

Scanning probe microscopy: trends and image processing issues
Author(s): Gopal Sarma Pingali; Ramesh C. Jain
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Paper Abstract

In this paper we present an overview of the state of the art in SXM with emphasis on image processing techniques for SXM. We outline the principle of operation of different scanning probe microscopes. Issues related to sensor technology are discussed. Commercially available scanning probe microscopes are listed and their features summarized. We review in detail the image processing work that has been done to date in relation to SXM and raise relevant issues. Existing and potential applications of SXM are discussed. Finally, we point out directions for future research in image processing related to SXM.

Paper Details

Date Published: 6 May 1993
PDF: 32 pages
Proc. SPIE 1907, Machine Vision Applications in Industrial Inspection, (6 May 1993); doi: 10.1117/12.144810
Show Author Affiliations
Gopal Sarma Pingali, Univ. of Michigan (United States)
Ramesh C. Jain, Univ. of Michigan (United States)

Published in SPIE Proceedings Vol. 1907:
Machine Vision Applications in Industrial Inspection
Frederick Y. Wu; Benjamin M. Dawson, Editor(s)

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