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Proceedings Paper

Output characteristics of ultrahigh repetition rate and high-power XeCl excimer laser
Author(s): Tatsumi Goto; S. Takagi; Naomichi Okamoto; K. Kakizaki; Saburoh Satoh
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Paper Abstract

A high repetition rate excimer laser has been developed. The laser gas can be circulated at a flow rate of 120 m/s uniformly in the discharge region by a 4-stage axial blower. The recent results are presented on the XeCl laser operated stably at an ultra-high repetition rate of 4 kHz and an average power of 200 W in the condition of CR equals 3 with thinner He buffer gas mixtures. Above this repetition rate, the laser power saturates caused by the discharge constrictions. The residual charged particles probably induce this localized discharge instability, and Xe content has a harmful influence dominantly on the output power.

Paper Details

Date Published: 4 May 1993
PDF: 6 pages
Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); doi: 10.1117/12.144668
Show Author Affiliations
Tatsumi Goto, Toshiba Corp. (Japan)
S. Takagi, Toshiba Corp. (Japan)
Naomichi Okamoto, Toshiba Corp. (Japan)
K. Kakizaki, Toshiba Corp. (Japan)
Saburoh Satoh, Toshiba Corp. (Japan)


Published in SPIE Proceedings Vol. 1810:
9th International Symposium on Gas Flow and Chemical Lasers

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