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Proceedings Paper

High-power (500-W) excimer laser project
Author(s): Helmut Frowein; Dirk Basting
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Paper Abstract

High power excimer lasers are required for industrial applications such as micromachining of printed circuit boards. Reliability and durability are as important as high output power. At the design of a new laser, the lifetime of gas and components must also be taken into consideration like output power and beam profile. Another point is the size of the laser. It should be transportable without being disassembled. The output power of excimer lasers can be written as pulse energy times repetition rate. There are various ways to reach 500 W output power. Opposite to the LPX805, which delivers a pulse energy of 3 J at a large beam cross section, we aspire to a pulse energy of approximately 800 - 1000 mJ with the system presented here. The maximum repetition rate of the laser is in the region of 500 - 600 Hz.

Paper Details

Date Published: 4 May 1993
PDF: 4 pages
Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); doi: 10.1117/12.144665
Show Author Affiliations
Helmut Frowein, Lambda Physik Forschungs GmbH (Germany)
Dirk Basting, Lambda Physik Forschungs GmbH (United States)


Published in SPIE Proceedings Vol. 1810:
9th International Symposium on Gas Flow and Chemical Lasers

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