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Proceedings Paper

Effects of xenon gas on generation and propagation of shock waves in the cavity of excimer laser
Author(s): Shinichiroh Kosugi; Kazuo Maeno; Hiroki Honma
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Paper Abstract

High repetition rate excimer lasers are expected for wide industrial application. The power of excimer laser, however, decreases rapidly in a higher repetition rate operation. Shock or acoustic waves, which are caused by the periodic pulse discharge, may limit the repetition rate of an excimer laser up to 2.5 kHz. Such waves cause inhomogeneity of gas density in the discharge region of the excimer laser. In high repetition rate operation this inhomogeneity remains at the next discharge. Arcing may be generated by this inhomogeneity and the homogeneous excitation of the laser gas is obstructed. Although these phenomena have been reported, the research for the effects of shock waves has remained insufficient. And the relation between these shock waves and discharge phenomena has not been clarified. To resolve this problem, we developed a scaling model chamber of a UV preionized excimer laser cavity with windows for flow visualization. We report the first result by using this model and Schlieren technique in a pure helium gas case. In our experiment three types of shock waves are found in the discharge cavity. Those shock waves are generated from the boundary of the main discharge area, from sparking pin gaps, and from the main electrode surfaces. In this study we focus on the effect of xenon gas on the generation and the propagation of shock waves. Components of the Xe-Cl excimer laser gas are helium, xenon, and hydrogen chloride. In those gases xenon has the largest molecular weight of 131.29. So we conclude xenon plays an important role in the shock wave propagation and in discharge phenomenon.

Paper Details

Date Published: 4 May 1993
PDF: 4 pages
Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); doi: 10.1117/12.144638
Show Author Affiliations
Shinichiroh Kosugi, Chiba Univ. and Toshiba Corp. (Japan)
Kazuo Maeno, Chiba Univ. (Japan)
Hiroki Honma, Chiba Univ. (Japan)


Published in SPIE Proceedings Vol. 1810:
9th International Symposium on Gas Flow and Chemical Lasers

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