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Proceedings Paper

Surface hardening and improvement of corrosion resistance of SUS304 by KrF excimer laser irradiation in SiH4 gas ambient
Author(s): Koichi Toyoda; Koji Sugioka
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Paper Abstract

Laser implant-deposition (LID) has been referred to as a specific process of surface modification of metals, in which simultaneous deposition and incorporation of Si atoms takes place. Hardness and chemical stability of the surface are improved by the LID process without affecting the intrinsic mechanical properties of the bulk materials. In addition, the surface color can be controlled by changing the film thickness of the deposited films.

Paper Details

Date Published: 4 May 1993
PDF: 4 pages
Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); doi: 10.1117/12.144584
Show Author Affiliations
Koichi Toyoda, RIKEN--The Institute of Physical and Chemical Research (Japan)
Koji Sugioka, RIKEN--The Institute of Physical and Chemical Research (Japan)


Published in SPIE Proceedings Vol. 1810:
9th International Symposium on Gas Flow and Chemical Lasers

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