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Proceedings Paper

Surface modifications of ceramic materials using excimer lasers: influence of plasma formation and materials properties on possible industrial applications
Author(s): K. Schutte; Hans Wilhelm Bergmann; Emil Schubert; Robert Queitsch
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Paper Abstract

The authors examine a contact free, optical machining process by illuminating ceramic substrates like alumina, silicon nitride, and silicon carbide with an excimer laser. Using the effect of sealing the surface by simultaneously smoothing and reducing of surface defects it is possible to generate a homogeneous, remelted surface layer. The influence of purity and pre- treatment on the wear-resistance against mechanical and dynamical stresses is reported. It can be shown that the applied laser parameters are strongly correlated to the results of the mechanical tests and the studies of the laser produced plasma concerning plasma formation, plasma propagation, and the local resolved spectroscopic measurements.

Paper Details

Date Published: 4 May 1993
PDF: 4 pages
Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); doi: 10.1117/12.144548
Show Author Affiliations
K. Schutte, Univ. Erlangen-Nuernberg (Germany)
Hans Wilhelm Bergmann, Univ. Erlangen-Nuernberg (Germany)
Emil Schubert, ATZ-EVUS (Germany)
Robert Queitsch, Univ. Erlangen-Nuernberg (Germany)

Published in SPIE Proceedings Vol. 1810:
9th International Symposium on Gas Flow and Chemical Lasers

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