Share Email Print
cover

Proceedings Paper

Laser ablation characterization of an ArF excimer-laser-ablated plasma
Author(s): Ye Yung Teng; Zen Wen Hwang; Yong Il Lee; Joseph Sneddon
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Recent work from this research group has investigated and characterized a plasma formed by an ArF excimer laser at a metal surface. The ArF excimer laser plasma has the potential to replace conventional plasma (e.g., inductively coupled plasma, direct current plasma, etc.) for spectrochemical analysis. This paper describes the formation and instrumentation used to characterize and evaluate the plasma. Space and time resolved studies using emission measurements were obtained for copper and lead targets. Results are presented which show that the two metals gave quite different sizes of plasma. The plasma formed with copper extending 2 mm, and that with lead extending 5 mm above the metal surface. Excitation temperature of the plasma was calculated using the Boltzmann method and found to be in the range 11,200 to 17,200 degree(s)K for copper and 11,700 to 15,300 degree(s)K for lead. The effect of pressure over the range 10 - 760 torr and atmosphere (air, argon, and helium) on the shape and line-to background ratio and temperature of the plasma created above the surface of a copper target also is discussed.

Paper Details

Date Published: 11 May 1993
PDF: 1 pages
Proc. SPIE 1979, 1992 International Conference on Lasers and Optoelectronics, (11 May 1993); doi: 10.1117/12.144178
Show Author Affiliations
Ye Yung Teng, Univ. of Massachusetts/Lowell (United States)
Zen Wen Hwang, Univ. of Massachusetts/Lowell (United States)
Yong Il Lee, Univ. of Massachusetts/Lowell (United States)
Joseph Sneddon, Univ. of Massachusetts/Lowell (United States)


Published in SPIE Proceedings Vol. 1979:
1992 International Conference on Lasers and Optoelectronics

© SPIE. Terms of Use
Back to Top