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Proceedings Paper

Laser automatic thick-film element photoetching system
Author(s): Tao-Lue Chen; Qirong Lu; Shaohe Chen; Ximing Deng
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Paper Abstract

By using micro-computer controlled stepmotor, we made the laser beam scan in accordance with the pattern of the thick-film element, and measured its resistance at the same time. The resistance value precision can reach 10-4.

Paper Details

Date Published: 11 May 1993
PDF: 3 pages
Proc. SPIE 1979, 1992 International Conference on Lasers and Optoelectronics, (11 May 1993); doi: 10.1117/12.144171
Show Author Affiliations
Tao-Lue Chen, Shanghai Institute of Optics and Fine Mechanics (China)
Qirong Lu, Shanghai Institute of Optics and Fine Mechanics (China)
Shaohe Chen, Shanghai Institute of Optics and Fine Mechanics (China)
Ximing Deng, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1979:
1992 International Conference on Lasers and Optoelectronics

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