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Proceedings Paper

Reducing the surface scattering of diamond optical thin films
Author(s): Yuanhua Shen; Xuantong Ying; Hang Xue; Zhongjing Xing; G. Q. Ke; K. T. Chen; Fengshan Zhang; Jianzhong Xu; ShiDe Ling; Xiuzhen Liang
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Paper Abstract

Since it has many outstanding properties, chemical vapor deposition (CVD) diamond thin film should be an excellent optical coating, but it has not been widely used because its surface is too rough. For reducing the surface roughness we tried different ways to process the substrates, choose optimum film growing conditions, polish the surface by ion beam and cover it with diamond-like-carbon (DLC) films. It has been shown that with the appropriate process, we can reproducibly get pretty smooth surface with roughness less than 250 angstroms and the transmittance of a silicon substrate, single side coated with diamond film, approaches 66% at wavelengths around 6 micrometers , which means the light scattering of the sample has been reduced to less than 1%.

Paper Details

Date Published: 11 May 1993
PDF: 10 pages
Proc. SPIE 1979, 1992 International Conference on Lasers and Optoelectronics, (11 May 1993); doi: 10.1117/12.144125
Show Author Affiliations
Yuanhua Shen, Fudan Univ. (China)
Xuantong Ying, Fudan Univ. (China)
Hang Xue, Fudan Univ. (China)
Zhongjing Xing, Fudan Univ. (China)
G. Q. Ke, Fudan Univ. (China)
K. T. Chen, Fudan Univ. (China)
Fengshan Zhang, Shanghai Institute of Technical Physics (China)
Jianzhong Xu, Shanghai Institute of Technical Physics (China)
ShiDe Ling, Shanghai Institute of Mechanical Engineering (China)
Xiuzhen Liang, Shanghai Institute of Mechanical Engineering (China)


Published in SPIE Proceedings Vol. 1979:
1992 International Conference on Lasers and Optoelectronics

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