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Proceedings Paper

Plume dynamics of excimer-laser-vaporized YBa2Cu3O7-delta material
Author(s): Robert C. Dye; Stephen R. Foltyn; Robert J. Brainard; A. R. Garcia; Ross E. Muenchausen; Xin Di Wu; Nicholas S. Nogar
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Paper Abstract

Pulsed laser deposition of thin films is a technology that has been explored in some detail. Because of the difficulty of monitoring in real time either the ablation process itself, or thin film growth, many studies have relied on diagnostics of either the ablated plume (emission, absorption, fluorescence) or the resulting films (Tc, Jc, X-ray, RBS) to infer information about the overall process. This indirect approach has provided some vital information for improving the production of high-temperature superconductors. In this study the plume dynamics during the in-situ pulsed laser deposition of YBa2Cu3O7-(delta ) thin films are investigated. The 248 and 308 nm lines of an excimer laser were used to generate a plume from a bulk YBa2Cu3O7-(delta ) target. Variations in the plume distribution as a function of processing gas, pressure, fluence, energy, and spot size were monitored by resulting film distribution and composition and time resolved emission imaging. Results indicate that the plume distribution can be controlled to some extent by the incident laser beam size; in addition, broadening increases with increasing oxygen pressure.

Paper Details

Date Published: 19 April 1993
PDF: 8 pages
Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); doi: 10.1117/12.143050
Show Author Affiliations
Robert C. Dye, Los Alamos National Lab. (United States)
Stephen R. Foltyn, Los Alamos National Lab. (United States)
Robert J. Brainard, Los Alamos National Lab. (United States)
A. R. Garcia, Los Alamos National Lab. (United States)
Ross E. Muenchausen, Los Alamos National Lab. (United States)
Xin Di Wu, Los Alamos National Lab. (United States)
Nicholas S. Nogar, Los Alamos National Lab. (United States)


Published in SPIE Proceedings Vol. 1835:
Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design
James A. Greer, Editor(s)

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