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Proceedings Paper

Dependence of excimer laser beam properties on laser gas composition
Author(s): Robert E. Turner; John L. Remo; Vinod Kumar
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Paper Abstract

Several new applications of excimer lasers in industry and medicine have increased the requirements for control of excimer laser beam parameters. Some applications require precise control of spatial uniformity, pulse-to-pulse amplitude variations and temporal profiles. The spatial and temporal characteristics of excimer laser beams are affected by small changes in laser gas composition. The role of gas composition, as well as methods for controlling gas composition, are discussed in relation to critical beam parameters.

Paper Details

Date Published: 19 April 1993
PDF: 7 pages
Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); doi: 10.1117/12.143040
Show Author Affiliations
Robert E. Turner, Applied Photonics, Inc. (United States)
John L. Remo, Applied Photonics, Inc. (United States)
Vinod Kumar, Applied Photonics, Inc. (United States)


Published in SPIE Proceedings Vol. 1835:
Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design
James A. Greer, Editor(s)

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