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Proceedings Paper

Laser-induced PVD technique for deposition of diamondlike carbon films
Author(s): Klaus R. Mann; F. Mueller
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Paper Abstract

Diamond-like-carbon (DLC) films have been grown on various substrates at low temperatures and low pressure by ablation of carbon particles using KrF excimer laser pulses of 30 ns duration. It is shown that the film properties strongly depend on the energy density of the incident laser beam and the deposition temperature. At energy densities above 8 J/cm2 and low substrate temperatures (< 200 degree(s)C) the coatings are transparent, while at lower energy densities or higher substrate temperatures only opaque films are obtained. The thin films were characterized by optical spectroscopy, x-ray diffraction, Raman scattering, and secondary electron microscopy. In addition to film growth and characterization, the kinetic energies and masses of laser ablated carbon ions have been investigated by time-of-flight spectroscopy. We observe an almost linear relation between kinetic particle energy and laser energy density, with maximum values as high as 220 eV at 23 J/cm2, indicating a strong correlation between laser energy density, particle energies and DLC film properties.

Paper Details

Date Published: 19 April 1993
PDF: 8 pages
Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); doi: 10.1117/12.143038
Show Author Affiliations
Klaus R. Mann, Laser-Lab. Goettingen e.V. (Germany)
F. Mueller, Laser-Lab. Goettingen e.V. (Germany)


Published in SPIE Proceedings Vol. 1835:
Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design
James A. Greer, Editor(s)

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