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Proceedings Paper

Micromachining with waveguide excimer lasers
Author(s): C. Paul Christensen; Michael T. Duignan; Louis R. Rodriguez
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Paper Abstract

Small, high-repetition-rate waveguide excimer lasers enable new approaches to pattern and shape generation by ultraviolet photoablation. Using a tabletop microfabrication system that integrates a waveguide excimer laser with vision and motion control systems, we have generated three dimensional structures through direct-write photoablation of polyimide substrates.

Paper Details

Date Published: 19 April 1993
PDF: 5 pages
Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); doi: 10.1117/12.143036
Show Author Affiliations
C. Paul Christensen, Potomac Photonics, Inc. (United States)
Michael T. Duignan, Potomac Photonics, Inc. (United States)
Louis R. Rodriguez, Potomac Photonics, Inc. (United States)


Published in SPIE Proceedings Vol. 1835:
Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design
James A. Greer, Editor(s)

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