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Proceedings Paper

Improvements in crystal optics for excimer lasers
Author(s): Ival Toepke; Dennis R. Cope
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Paper Abstract

Recent advances in the purification and growth of high purity alkaline earth fluorides, particularly CaF2, are increasing the damage threshold and longevity of transmissive optics for use with excimer lasers. A general overview of the properties and performance of these high purity materials is presented.

Paper Details

Date Published: 19 April 1993
PDF: 9 pages
Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); doi: 10.1117/12.143033
Show Author Affiliations
Ival Toepke, Solon Technologies, Inc. (United States)
Dennis R. Cope, Solon Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 1835:
Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design
James A. Greer, Editor(s)

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