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Proceedings Paper

Optical materials for use with excimer lasers
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Paper Abstract

Synthetic UV-grade fused silica, crystalline fluorides, and dielectric coatings have been evaluated for transparency and durability at 193 nm. Most bulk materials eventually develop color centers, and fused silica also changes its density and index of refraction. However, the rate at which these changes occur and their magnitude vary strongly with material, grade, and other more subtle details. Careful selection and possibly pretesting are recommended, in order to ensure optimal matching between the intended application and the material properties.

Paper Details

Date Published: 19 April 1993
PDF: 9 pages
Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); doi: 10.1117/12.143032
Show Author Affiliations
Jan H. C. Sedlacek, Lincoln Lab./MIT (United States)
Mordechai Rothschild, Lincoln Lab./MIT (United States)

Published in SPIE Proceedings Vol. 1835:
Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design
James A. Greer, Editor(s)

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