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Proceedings Paper

Characterization, setup, and control of a manufacturing laser ablation tool and process
Author(s): Gerhard E. Wolbold; Christopher L. Tessler; Dawn J. Tudryn
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Paper Abstract

This paper is a description of the ablation of polyimide with an excimer laser ablation tool in a manufacturing line. The light source is a 150 watt, XeCl (308 nm) gas laser. Two methods of ablating via patterns with the laser tool (full-chip and scan modes) will be discussed, in addition to the tool, set-up, operation and tool/process control.

Paper Details

Date Published: 19 April 1993
PDF: 8 pages
Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); doi: 10.1117/12.143030
Show Author Affiliations
Gerhard E. Wolbold, IBM East Fishkill (United States)
Christopher L. Tessler, IBM East Fishkill (United States)
Dawn J. Tudryn, IBM East Fishkill (United States)

Published in SPIE Proceedings Vol. 1835:
Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design
James A. Greer, Editor(s)

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