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Proceedings Paper

Adjustment and design criteria of lenses in the case of partially coherent imaging
Author(s): Jens-Ullrich Mueller; Gerd Rieche; Dietrich Schmidt
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Paper Abstract

The options of the PRKH software are presented. The PRKH software is designed for the calculations of intensity distributions in partially coherent imaging of two-dimensional structures. The consistency check of the PRKH software was performed by comparison between PRKH-computed intensities and measurements in the image field of a projection lens. The achieved results were generalized, and adjustment rules were derived from them.

Paper Details

Date Published: 15 April 1993
PDF: 12 pages
Proc. SPIE 1780, Lens and Optical Systems Design, (15 April 1993); doi: 10.1117/12.142809
Show Author Affiliations
Jens-Ullrich Mueller, Carl Zeiss (Germany)
Gerd Rieche, Carl Zeiss (Germany)
Dietrich Schmidt, Carl Zeiss (Germany)


Published in SPIE Proceedings Vol. 1780:
Lens and Optical Systems Design

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