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Proceedings Paper

Diffractive optical elements fabricated by laser direct writing and other techniques
Author(s): Pierre Langlois; Hubert Jerominek; Luc Leclerc; Jin Pan
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Paper Abstract

Four different thin DOE pattern generation techniques used at National Optics Institute (NOI) are discussed and compared: laser direct writing in photoresist, microlithography with e-beam masks, holographic recording, and laser assisted microfabrication. NOI special equipment used for each technique is described and applications are presented.

Paper Details

Date Published: 13 January 1993
PDF: 11 pages
Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.142573
Show Author Affiliations
Pierre Langlois, National Optics Institute (Canada)
Hubert Jerominek, National Optics Institute (Canada)
Luc Leclerc, National Optics Institute (Canada)
Jin Pan, National Optics Institute (Canada)

Published in SPIE Proceedings Vol. 1751:
Miniature and Micro-Optics: Fabrication and System Applications II
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

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