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Proceedings Paper

Laser coalescence of gold clusters in gold-fluorocarbon composite films
Author(s): Paul B. Comita; W. Jacob; E. Kay; Ron Zhang
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Paper Abstract

The formation of conducting films from composite films comprised of gold clusters in plasma polymerized polyfluorocarbon (PPFC) is described. A focussed, visible laser beam is used to coalesce the gold clusters within the PPFC matrix. Heating the composite with the laser causes the film to collapse with a loss of weight due to decomposition and volatilization of the polymer. Under the appropriate laser power and scanning conditions, coalescence of the gold particles results in a conducting metal line, exhibiting close to bulk metal resistivity.

Paper Details

Date Published: 16 March 1993
PDF: 7 pages
Proc. SPIE 1804, Rapid Thermal and Laser Processing, (16 March 1993); doi: 10.1117/12.142088
Show Author Affiliations
Paul B. Comita, IBM Almaden Research Ctr. (United States)
W. Jacob, Max-Planck-Institut fuer Plasmaphysik (United States)
E. Kay, IBM Almaden Research Ctr. (United States)
Ron Zhang, IBM Almaden Research Ctr. (United States)


Published in SPIE Proceedings Vol. 1804:
Rapid Thermal and Laser Processing
Dim-Lee Kwong; Heinrich G. Mueller, Editor(s)

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