Share Email Print

Proceedings Paper

Using lasers to understand and control the chemistry of semiconductor-related precursors
Author(s): Brent D. Koplitz; Valentin G. Panayotov; Kyle Hamar; Kurt Birdwhistell; Lynn Vogel Koplitz; Teresa L. T. Birdwhistell; Xiaodong Xu; Subhash Deshmukh; Jeffrey L. Brum; James Lee
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We present results on the laser-induced photochemistry, ablation, and deposition of a variety of precursor compounds used for III-V semiconductor growth. With compounds such as monoethylarsine, triethylarsenic, and triethylgallium, our efforts are focused on using lasers to generate and detect atomic hydrogen, a species that is known to be a good radical scavenger in certain III-V semiconductor growth environments. We also present results on the laser ablation of inorganic salts that may be useful as precursors for III-V thin-film growth. Here, K3Ga3As4 and K2Ga2Sb4 are irradiated with various excimer laser wavelengths, and we report on the ablation and deposition chemistry induced by such radiation. The prognosis for viable film growth using this approach is also discussed. Finally, recent efforts involving the photochemistry and subsequent deposition characteristics of a Pt- containing organometallic compound, C5H5Pt(CH3)3, are presented.

Paper Details

Date Published: 16 March 1993
PDF: 8 pages
Proc. SPIE 1804, Rapid Thermal and Laser Processing, (16 March 1993); doi: 10.1117/12.142079
Show Author Affiliations
Brent D. Koplitz, Tulane Univ. (United States)
Valentin G. Panayotov, Tulane Univ. (United States)
Kyle Hamar, Tulane Univ. (United States)
Kurt Birdwhistell, Loyola Univ. (United States)
Lynn Vogel Koplitz, Loyola Univ. (United States)
Teresa L. T. Birdwhistell, Xavier Univ. (United States)
Xiaodong Xu, Tulane Univ. (China)
Subhash Deshmukh, Tulane Univ. (United States)
Jeffrey L. Brum, Tulane Univ. (United States)
James Lee, Tulane Univ. (United States)

Published in SPIE Proceedings Vol. 1804:
Rapid Thermal and Laser Processing
Dim-Lee Kwong; Heinrich G. Mueller, Editor(s)

© SPIE. Terms of Use
Back to Top