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Proceedings Paper

Image sensor used in displacement measuring with high resolution
Author(s): Xianghui Yuan; Guolin Lu; Tingchao Zhao
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Paper Abstract

A kind of specially designed MOS image sensor (IS) with high sensitivity is introduced in the paper. The IS is used to receive moire signals to form a phase-modulated signal. With dynamic phase discriminating and subdivision, a very high resolution and precision can be achieved. This special image sensor is valuable in practical designing of high resolution (<EQ 0.1 micrometers ), high precision, and low cost grating displacement transducer.

Paper Details

Date Published: 1 April 1993
PDF: 6 pages
Proc. SPIE 1982, Photoelectronic Detection and Imaging: Technology and Applications '93, (1 April 1993); doi: 10.1117/12.142031
Show Author Affiliations
Xianghui Yuan, Chongqing Univ. (China)
Guolin Lu, Chongqing Univ. (China)
Tingchao Zhao, Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 1982:
Photoelectronic Detection and Imaging: Technology and Applications '93

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